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PSG Tool

Product Information

Y.A.C. Technologies Co., Ltd.

  • Batch(200wfs/h) type Tool by an automatic transfer cassette
  • Phosphorus glass removal after diffusion
  • Tank configuration that corresponds to the Mono crystal and polycrystalline is possible

PSG Tool - Product Details.

Standard Specification

PSG Tool Standard specification
Dimension 18000(W) x 2100(D) x 2600(H)
Throughput 2000wfs/h
Bath Configlation
LD
Alkali
Rince-1
HF-1
Rince-2
HF/HNO3
Rince-3
HF-2
Rince-3
Pre Dry (HOT DIW)
Dry (HOT Blow)
ULD
Option Chemical Supply System, FA etc
Safety Specification Possible to the corresponding CE-Mark and UL standards

Inquiries About Products

SALES DEPT.

Email: sales@yac.com.sg